What is the current annual CAPEX of MKSI?

As of today, MKSI annual CAPEX is $148.00M

What is 1-year change in MKSI annual CAPEX?

MKSI annual CAPEX is up +25.42% year-over-year

What is 3-year change in MKSI annual CAPEX?

MKSI annual CAPEX is down -9.76% over the past 3 years

How far is MKSI annual CAPEX from its all-time high?

MKSI annual CAPEX is currently -9.76% below its historical high of $164.00M set on December 31, 2022

How does MKSI annual CAPEX rank versus sector peers?

MKSI annual CAPEX is higher than 84.55% of companies in Technology sector

When is MKSI next annual earnings release?

As of today, the next annual earnings release for MKSI has not been scheduled

What is the current quarterly CAPEX of MKSI?

As of today, MKSI quarterly CAPEX is $50.00M

What is MKSI quarterly CAPEX most recent change?

MKSI quarterly CAPEX was down -1.96% on December 31, 2025

What is 1-year change in MKSI quarterly CAPEX?

MKSI quarterly CAPEX is down -1.96% year-over-year

How far is MKSI quarterly CAPEX from its all-time high?

MKSI quarterly CAPEX is currently -21.88% below its historical high of $64.00M set on June 30, 2022

How does MKSI quarterly CAPEX rank versus sector peers?

MKSI quarterly CAPEX is higher than 84.06% of companies in Technology sector

When is MKSI next earnings release?

The next earnings release for MKSI is on May 6, 2026

What is the current TTM CAPEX of MKSI?

As of today, MKSI TTM CAPEX is $148.00M

What is MKSI TTM CAPEX most recent change?

MKSI TTM CAPEX was down -0.67% on December 31, 2025

What is 1-year change in MKSI TTM CAPEX?

MKSI TTM CAPEX is up +25.42% year-over-year

How far is MKSI TTM CAPEX from its all-time high?

MKSI TTM CAPEX is currently -9.76% below its historical high of $164.00M set on December 31, 2022

How does MKSI TTM CAPEX rank versus sector peers?

MKSI TTM CAPEX is higher than 82.16% of companies in Technology sector

When is MKSI next earnings release?

The next earnings release for MKSI is on May 6, 2026

MKS Inc. (MKSI) CAPEX History & Chart Since 1997

Annual CAPEX

$148.00M$30.00M+25.42%

December 31, 2025

Summary

Current Value: As of today, MKSI annual CAPEX is $148.00M, up +25.42% on December 31, 2025
Historical Performance: MKSI annual CAPEX is down -9.76% over the past 3 years, up +74.32% over the past 5 years
All-Time High Comparison: MKSI annual CAPEX is currently -9.76% below its historical high of $164.00M set on December 31, 2022
3-Year Low Comparison: MKSI annual CAPEX is +70.11% above its 3-year low of $87.00M reached on December 31, 2023
Sector Comparison: MKSI annual CAPEX is higher than 84.55% of companies in Technology sector

CAPEX Chart

Add series to chart

Add series to chart1/6

Performance

MKSI Performance
Metric	Date	Value	1Y	3Y	5Y	15Y
Annual CAPEX	Dec 31, 25	$148.00M	+25.4%	-9.8%	+74.3%	+835.6%
Quarterly CAPEX	Dec 31, 25	$50.00M	-2.0%	-9.1%	+100.0%	+1039.2%
TTM CAPEX	Dec 31, 25	$148.00M	+25.4%	-9.8%	+74.3%	+835.6%
Price	Mar 9, 26	$218.36	+157.2%	+142.1%	+34.3%	+613.8%
	Dec 31, 25	$645.00M	+30.3%	+21.9%	+25.7%	+294.6%
	Dec 31, 25	$497.00M	+31.8%	+36.2%	+16.0%	+236.6%
	Dec 31, 25	-$145.00M	-23.9%	+96.8%	+28.4%	-37.3%
	Dec 31, 25	$8.80B	+2.4%	-23.5%	+125.3%	+809.3%
	Dec 31, 25	$344.00M	-1.1%	+59.3%	+246.8%	+2388.6%

CAPEX Highs

MKSI Annual CAPEX Highs Comparison
Period	High	Date	Current
3Y	$164.00M	N/A	-9.8%
5Y	$164.00M	Dec 31, 22	-9.8%
All	$164.00M	Dec 31, 22	-9.8%

CAPEX Lows

MKSI Annual CAPEX Lows Comparison
Period	Low	Date	Current
3Y	$87.00M	Dec 31, 23	+70.1%
5Y	$84.90M	N/A	+74.3%
All	$3.14M	Dec 31, 98	+4617.9%

CAPEX History

Year	Value	Change
2025	$148.00M	+25.4%
2024	$118.00M	+35.6%
2023	$87.00M	-47.0%
2022	$164.00M	+89.2%
2021	$86.70M	+2.1%
2020	$84.90M	+32.9%
2019	$63.90M	+1.5%
2018	$62.94M	+101.2%
2017	$31.29M	+63.6%
2016	$19.12M	+54.0%
2015	$12.41M	-5.8%
2014	$13.18M	+6.2%
2013	$12.41M	-29.9%
2012	$17.71M	+13.7%
2011	$15.57M	-1.6%

Year	Value	Change
2010	$15.82M	+278.5%
2009	$4.18M	-68.9%
2008	$13.46M	-10.8%
2007	$15.09M	+41.2%
2006	$10.69M	+4.0%
2005	$10.28M	-43.7%
2004	$18.27M	+187.8%
2003	$6.35M	-20.1%
2002	$7.95M	-45.7%
2001	$14.64M	+28.3%
2000	$11.41M	+79.4%
1999	$6.36M	+102.7%
1998	$3.14M	-4.0%
1997	$3.27M	-

FAQ

What is the current annual CAPEX of MKSI?
As of today, MKSI annual CAPEX is $148.00M
What is 1-year change in MKSI annual CAPEX?
MKSI annual CAPEX is up +25.42% year-over-year
What is 3-year change in MKSI annual CAPEX?
MKSI annual CAPEX is down -9.76% over the past 3 years
How far is MKSI annual CAPEX from its all-time high?
MKSI annual CAPEX is currently -9.76% below its historical high of $164.00M set on December 31, 2022
How does MKSI annual CAPEX rank versus sector peers?
MKSI annual CAPEX is higher than 84.55% of companies in Technology sector
When is MKSI next annual earnings release?
As of today, the next annual earnings release for MKSI has not been scheduled

Quarterly CAPEX

$50.00M$1.00M-1.96%

December 31, 2025

Summary

Current Value: As of today, MKSI quarterly CAPEX is $50.00M, down -1.96% on December 31, 2025
Historical Performance: MKSI quarterly CAPEX is down -1.96% year-over-year, down -9.09% over the past 3 years
All-Time High Comparison: MKSI quarterly CAPEX is currently -21.88% below its historical high of $64.00M set on June 30, 2022
3-Year Low Comparison: MKSI quarterly CAPEX is +194.12% above its 3-year low of $17.00M reached on March 31, 2023
Sector Comparison: MKSI quarterly CAPEX is higher than 84.06% of companies in Technology sector

Performance

MKSI Performance
Metric	Date	Value	3M	1Y	3Y	5Y
Quarterly CAPEX	Dec 31, 25	$50.00M	-2.0%	-2.0%	-9.1%	+100.0%
Annual CAPEX	Dec 31, 25	$148.00M	–	+25.4%	-9.8%	+74.3%
TTM CAPEX	Dec 31, 25	$148.00M	-0.7%	+25.4%	-9.8%	+74.3%
Price	Mar 9, 26	$218.36	+32.2%	+157.2%	+142.1%	+34.3%
	Dec 31, 25	$142.00M	-27.9%	-19.3%	-22.8%	-3.5%
	Dec 31, 25	$92.00M	-37.0%	-26.4%	-28.7%	-24.7%
	Dec 31, 25	-$49.00M	+3.9%	+3.9%	+5.8%	-62.8%
	Dec 31, 25	$8.80B	+0.2%	+2.4%	-23.5%	+125.3%
	Dec 31, 25	$86.00M	0.0%	0.0%	-10.4%	+267.5%

Quarterly CAPEX Highs

MKSI Quarterly CAPEX Highs Comparison
Period	High	Date	Current
1Y	$51.00M	Sep 30, 25	-2.0%
3Y	$55.00M	N/A	-9.1%
5Y	$64.00M	Jun 30, 22	-21.9%
All	$64.00M	Jun 30, 22	-21.9%

Quarterly CAPEX Lows

MKSI Quarterly CAPEX Lows Comparison
Period	Low	Date	Current
1Y	$18.00M	Mar 31, 25	+177.8%
3Y	$17.00M	Mar 31, 23	+194.1%
5Y	$16.30M	Jun 30, 21	+206.8%
All	$678.00K	Sep 30, 09	+7274.6%

Quarterly CAPEX History

Month	Value	Change
Dec 2025	$50.00M	-2.0%
Sep 2025	$51.00M	+75.9%
Jun 2025	$29.00M	+61.1%
Mar 2025	$18.00M	-64.7%
Dec 2024	$51.00M	+131.8%
Sep 2024	$22.00M	-18.5%
Jun 2024	$27.00M	+50.0%
Mar 2024	$18.00M	-47.1%
Dec 2023	$34.00M	+88.9%
Sep 2023	$18.00M	0.0%
Jun 2023	$18.00M	+5.9%
Mar 2023	$17.00M	-69.1%
Dec 2022	$55.00M	+111.5%
Sep 2022	$26.00M	-59.4%
Jun 2022	$64.00M	+236.8%
Mar 2022	$19.00M	-18.8%
Dec 2021	$23.40M	+14.1%
Sep 2021	$20.50M	+25.8%
Jun 2021	$16.30M	-38.5%
Mar 2021	$26.50M	+6.0%
Dec 2020	$25.00M	-13.8%
Sep 2020	$29.00M	+38.8%
Jun 2020	$20.90M	+109.0%
Mar 2020	$10.00M	-47.8%
Dec 2019	$19.15M	+16.1%
Sep 2019	$16.50M	+20.2%
Jun 2019	$13.73M	-5.5%
Mar 2019	$14.53M	-44.2%
Dec 2018	$26.06M	+72.9%
Sep 2018	$15.07M	+21.2%
Jun 2018	$12.43M	+32.4%
Mar 2018	$9.39M	-30.1%
Dec 2017	$13.43M	+65.4%
Sep 2017	$8.12M	+43.9%
Jun 2017	$5.64M	+37.6%
Mar 2017	$4.10M	-42.8%
Dec 2016	$7.16M	+52.6%
Sep 2016	$4.70M	-8.1%
Jun 2016	$5.11M	+136.9%
Mar 2016	$2.16M	-39.8%
Dec 2015	$3.58M	+2.5%
Sep 2015	$3.50M	+23.6%
Jun 2015	$2.83M	+13.0%
Mar 2015	$2.50M	-34.5%
Dec 2014	$3.82M	+81.3%
Sep 2014	$2.11M	-49.3%
Jun 2014	$4.16M	+34.2%
Mar 2014	$3.10M	-4.9%
Dec 2013	$3.26M	+16.5%
Sep 2013	$2.79M	-7.0%
Jun 2013	$3.00M	-10.5%
Mar 2013	$3.36M	-49.6%
Dec 2012	$6.67M	+120.1%
Sep 2012	$3.03M	-12.1%

Month	Value	Change
Jun 2012	$3.45M	-24.6%
Mar 2012	$4.57M	-22.3%
Dec 2011	$5.88M	+71.5%
Sep 2011	$3.43M	-12.9%
Jun 2011	$3.93M	+68.8%
Mar 2011	$2.33M	-46.9%
Dec 2010	$4.39M	-8.6%
Sep 2010	$4.80M	+43.2%
Jun 2010	$3.35M	+2.4%
Mar 2010	$3.27M	+188.5%
Dec 2009	$1.14M	+67.4%
Sep 2009	$678.00K	-35.8%
Jun 2009	$1.06M	-19.4%
Mar 2009	$1.31M	-74.0%
Dec 2008	$5.04M	+70.0%
Sep 2008	$2.97M	+29.6%
Jun 2008	$2.29M	-27.4%
Mar 2008	$3.16M	-11.6%
Dec 2007	$3.57M	-22.7%
Sep 2007	$4.62M	+0.9%
Jun 2007	$4.58M	+97.7%
Mar 2007	$2.32M	-35.9%
Dec 2006	$3.61M	+26.0%
Sep 2006	$2.87M	+33.6%
Jun 2006	$2.15M	+4.0%
Mar 2006	$2.06M	-22.9%
Dec 2005	$2.68M	-0.8%
Sep 2005	$2.70M	+5.3%
Jun 2005	$2.56M	+9.4%
Mar 2005	$2.34M	-45.4%
Dec 2004	$4.29M	-10.6%
Sep 2004	$4.79M	-3.0%
Jun 2004	$4.94M	+16.3%
Mar 2004	$4.25M	+163.4%
Dec 2003	$1.61M	-6.9%
Sep 2003	$1.73M	+32.2%
Jun 2003	$1.31M	-22.5%
Mar 2003	$1.69M	-20.0%
Dec 2002	$2.12M	+11.7%
Sep 2002	$1.89M	-27.3%
Jun 2002	$2.61M	+95.1%
Mar 2002	$1.34M	-35.6%
Dec 2001	$2.07M	-31.4%
Sep 2001	$3.03M	-34.8%
Jun 2001	$4.64M	-5.2%
Mar 2001	$4.90M	+0.4%
Dec 2000	$4.88M	+106.4%
Sep 2000	$2.36M	+4.1%
Jun 2000	$2.27M	+52.8%
Mar 2000	$1.49M	-7.9%
Dec 1999	$1.61M	+9.8%
Sep 1999	$1.47M	+7.1%
Jun 1999	$1.37M	+31.0%
Mar 1999	$1.05M	-

FAQ

What is the current quarterly CAPEX of MKSI?
As of today, MKSI quarterly CAPEX is $50.00M
What is MKSI quarterly CAPEX most recent change?
MKSI quarterly CAPEX was down -1.96% on December 31, 2025
What is 1-year change in MKSI quarterly CAPEX?
MKSI quarterly CAPEX is down -1.96% year-over-year
How far is MKSI quarterly CAPEX from its all-time high?
MKSI quarterly CAPEX is currently -21.88% below its historical high of $64.00M set on June 30, 2022
How does MKSI quarterly CAPEX rank versus sector peers?
MKSI quarterly CAPEX is higher than 84.06% of companies in Technology sector
When is MKSI next earnings release?
The next earnings release for MKSI is on May 6, 2026

TTM CAPEX

$148.00M$1.00M-0.67%

December 31, 2025

Summary

Current Value: As of today, MKSI TTM CAPEX is $148.00M, down -0.67% on December 31, 2025
Historical Performance: MKSI TTM CAPEX is up +25.42% year-over-year, down -9.76% over the past 3 years
All-Time High Comparison: MKSI TTM CAPEX is currently -9.76% below its historical high of $164.00M set on December 31, 2022
3-Year Low Comparison: MKSI TTM CAPEX is +70.11% above its 3-year low of $87.00M reached on December 31, 2023
Sector Comparison: MKSI TTM CAPEX is higher than 82.16% of companies in Technology sector

Performance

MKSI Performance
Metric	Date	Value	3M	1Y	3Y	5Y
TTM CAPEX	Dec 31, 25	$148.00M	-0.7%	+25.4%	-9.8%	+74.3%
Annual CAPEX	Dec 31, 25	$148.00M	–	+25.4%	-9.8%	+74.3%
Quarterly CAPEX	Dec 31, 25	$50.00M	-2.0%	-2.0%	-9.1%	+100.0%
Price	Mar 9, 26	$218.36	+32.2%	+157.2%	+142.1%	+34.3%
	Dec 31, 25	$645.00M	-5.0%	+30.3%	+21.9%	+25.7%
	Dec 31, 25	$497.00M	-6.2%	+31.8%	+36.2%	+16.0%
	Dec 31, 25	-$145.00M	+1.4%	-23.9%	+96.8%	+28.4%
	Dec 31, 25	$8.80B	+0.2%	+2.4%	-23.5%	+125.3%
	Dec 31, 25	$344.00M	0.0%	-1.1%	+59.3%	+246.8%

TTM CAPEX Highs

MKSI TTM CAPEX Highs Comparison
Period	High	Date	Current
1Y	$149.00M	Sep 30, 25	-0.7%
3Y	$164.00M	N/A	-9.8%
5Y	$164.00M	Dec 31, 22	-9.8%
All	$164.00M	Dec 31, 22	-9.8%

TTM CAPEX Lows

MKSI TTM CAPEX Lows Comparison
Period	Low	Date	Current
1Y	$118.00M	Mar 31, 25	+25.4%
3Y	$87.00M	Dec 31, 23	+70.1%
5Y	$79.20M	Mar 31, 22	+86.9%
All	$1.05M	Mar 31, 99	>+9999.0%

TTM CAPEX History

Month	Value	Change
Dec 2025	$148.00M	-0.7%
Sep 2025	$149.00M	+24.2%
Jun 2025	$120.00M	+1.7%
Mar 2025	$118.00M	0.0%
Dec 2024	$118.00M	+16.8%
Sep 2024	$101.00M	+4.1%
Jun 2024	$97.00M	+10.2%
Mar 2024	$88.00M	+1.1%
Dec 2023	$87.00M	-19.4%
Sep 2023	$108.00M	-6.9%
Jun 2023	$116.00M	-28.4%
Mar 2023	$162.00M	-1.2%
Dec 2022	$164.00M	+23.9%
Sep 2022	$132.40M	+4.3%
Jun 2022	$126.90M	+60.2%
Mar 2022	$79.20M	-8.7%
Dec 2021	$86.70M	-1.8%
Sep 2021	$88.30M	-8.8%
Jun 2021	$96.80M	-4.5%
Mar 2021	$101.40M	+19.4%
Dec 2020	$84.90M	+7.4%
Sep 2020	$79.05M	+18.8%
Jun 2020	$66.55M	+12.1%
Mar 2020	$59.38M	-7.1%
Dec 2019	$63.90M	-9.8%
Sep 2019	$70.81M	+2.1%
Jun 2019	$69.38M	+1.9%
Mar 2019	$68.08M	+8.2%
Dec 2018	$62.94M	+25.1%
Sep 2018	$50.32M	+16.0%
Jun 2018	$43.37M	+18.6%
Mar 2018	$36.58M	+16.9%
Dec 2017	$31.29M	+25.0%
Sep 2017	$25.02M	+15.8%
Jun 2017	$21.60M	+2.5%
Mar 2017	$21.07M	+10.2%
Dec 2016	$19.12M	+23.0%
Sep 2016	$15.54M	+8.4%
Jun 2016	$14.34M	+18.9%
Mar 2016	$12.07M	-2.8%
Dec 2015	$12.41M	-1.9%
Sep 2015	$12.65M	+12.3%
Jun 2015	$11.26M	-10.5%
Mar 2015	$12.59M	-4.5%
Dec 2014	$13.18M	+4.5%
Sep 2014	$12.62M	-5.2%
Jun 2014	$13.31M	+9.5%
Mar 2014	$12.15M	-2.1%
Dec 2013	$12.41M	-21.6%
Sep 2013	$15.82M	-1.5%
Jun 2013	$16.05M	-2.7%
Mar 2013	$16.49M	-6.8%
Dec 2012	$17.71M	+4.7%
Sep 2012	$16.92M	-2.3%

Month	Value	Change
Jun 2012	$17.31M	-2.7%
Mar 2012	$17.80M	+14.4%
Dec 2011	$15.57M	+10.6%
Sep 2011	$14.08M	-8.9%
Jun 2011	$15.46M	+3.9%
Mar 2011	$14.88M	-6.0%
Dec 2010	$15.82M	+25.9%
Sep 2010	$12.57M	+48.9%
Jun 2010	$8.44M	+37.4%
Mar 2010	$6.14M	+47.0%
Dec 2009	$4.18M	-48.3%
Sep 2009	$8.09M	-22.1%
Jun 2009	$10.38M	-10.6%
Mar 2009	$11.61M	-13.7%
Dec 2008	$13.46M	+12.3%
Sep 2008	$11.98M	-12.1%
Jun 2008	$13.64M	-14.4%
Mar 2008	$15.93M	+5.6%
Dec 2007	$15.09M	-0.3%
Sep 2007	$15.13M	+13.1%
Jun 2007	$13.38M	+22.3%
Mar 2007	$10.94M	+2.4%
Dec 2006	$10.69M	+9.6%
Sep 2006	$9.76M	+1.8%
Jun 2006	$9.59M	-4.2%
Mar 2006	$10.00M	-2.7%
Dec 2005	$10.28M	-13.5%
Sep 2005	$11.89M	-15.0%
Jun 2005	$13.99M	-14.5%
Mar 2005	$16.36M	-10.4%
Dec 2004	$18.27M	+17.1%
Sep 2004	$15.60M	+24.4%
Jun 2004	$12.54M	+40.8%
Mar 2004	$8.91M	+40.3%
Dec 2003	$6.35M	-7.3%
Sep 2003	$6.85M	-2.3%
Jun 2003	$7.01M	-15.6%
Mar 2003	$8.30M	+4.5%
Dec 2002	$7.95M	+0.5%
Sep 2002	$7.91M	-12.5%
Jun 2002	$9.04M	-18.4%
Mar 2002	$11.08M	-24.3%
Dec 2001	$14.64M	-16.1%
Sep 2001	$17.44M	+3.9%
Jun 2001	$16.78M	+16.5%
Mar 2001	$14.41M	+31.0%
Dec 2000	$11.00M	+42.2%
Sep 2000	$7.73M	+13.1%
Jun 2000	$6.84M	+15.1%
Mar 2000	$5.94M	+8.0%
Dec 1999	$5.51M	+41.5%
Sep 1999	$3.89M	+60.7%
Jun 1999	$2.42M	+131.0%
Mar 1999	$1.05M	-

FAQ

What is the current TTM CAPEX of MKSI?
As of today, MKSI TTM CAPEX is $148.00M
What is MKSI TTM CAPEX most recent change?
MKSI TTM CAPEX was down -0.67% on December 31, 2025
What is 1-year change in MKSI TTM CAPEX?
MKSI TTM CAPEX is up +25.42% year-over-year
How far is MKSI TTM CAPEX from its all-time high?
MKSI TTM CAPEX is currently -9.76% below its historical high of $164.00M set on December 31, 2022
How does MKSI TTM CAPEX rank versus sector peers?
MKSI TTM CAPEX is higher than 82.16% of companies in Technology sector
When is MKSI next earnings release?
The next earnings release for MKSI is on May 6, 2026

Data Sources & References

MKSI Official Website www.mks.com
Most Recent Quarterly Report (10-Q) www.sec.gov/Archives/edgar/data/1049502/000119312526017468/0001193125-26-017468-index.htm
Most Recent Annual Report (10-K) www.sec.gov/Archives/edgar/data/1049502/000119312526066820/0001193125-26-066820-index.htm
MKSI Profile on Yahoo Finance finance.yahoo.com/quote/MKSI
MKSI Profile on NASDAQ.com www.nasdaq.com/market-activity/stocks/mksi